Patent Assignment
Reel/Frame 057823/0738
Assignment of Assignor's Interest
Recorded: 2021-10-18
Pages: 4
Assignors
CHEN, TAI-YU
Executed: 2021-07-10
CHIEN, SHANG-CHIEH
Executed: 2021-07-02
YU, SHENG-KANG
Executed: 2021-06-29
CHEN, LI-JUI
Executed: 2021-07-09
LIU, HENG-HSIN
Executed: 2021-06-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
System and Method for Omnidirectional Real Time Detection of Photolithography Characteristics