Patent Assignment
Reel/Frame 057865/0202
Assignment of Assignor's Interest
Recorded: 2021-10-21
Pages: 3
Assignors
BERA, KALLOL
Executed: 2021-10-18
LI, XIAOPU
Executed: 2021-10-14
TANAKA, TSUTOMU
Executed: 2021-10-21
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus for Generating Plasma with Ion Blocker Plate
Application:
17/491,988 →
Publication:
US 2023/0107392