Patent Assignment
Reel/Frame 057870/0951
Assignment of Assignor's Interest
Recorded: 2021-10-21
Pages: 8
Assignors
IGARASHI, YOSHIKI
Executed: 2021-10-13
KIKUSHIMA, SATORU
Executed: 2021-10-13
SUGA, TAKAYUKI
Executed: 2021-10-13
CHU, CHENGYA
Executed: 2021-10-13
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Etching Apparatus