Patent Assignment
Reel/Frame 058027/0301
Assignment of Assignor's Interest
Recorded: 2021-11-05
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method