Patent Assignment
Reel/Frame 058056/0386
Assignment of Assignor's Interest
Recorded: 2021-11-09
Pages: 8
Assignors
ZHANG, DU
Executed: 2021-10-21
KIM, HOJIN
Executed: 2021-10-21
TAHARA, SHIGERU
Executed: 2021-11-08
MAEKAWA, KAORU
Executed: 2021-10-27
WANG, MINGMEI
Executed: 2021-10-27
FAGUET, JACQUES
Executed: 2021-11-05
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Selective Etching with Fluorine, Oxygen and Noble Gas Containing Plasmas
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.