Patent Assignment
Reel/Frame 058068/0246
Assignment of Assignor's Interest
Recorded: 2021-11-10
Pages: 4
Assignors
PAENG, DONG WOO
Executed: 2019-05-06
KIM, YUNSANG S.
Executed: 2019-05-06
ZHANG, HE
Executed: 2019-05-06
WELLS, KEITH
Executed: 2019-05-06
SCHOEPP, ALAN M.
Executed: 2019-05-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etch and Deposition Processing Systems Including a Lens Circuit with a Tele-Centric Lens, an Optical Beam Folding Assembly, or a Polygon Scanner