Patent Assignment
Reel/Frame 058069/0441
Assignment of Assignor's Interest
Recorded: 2021-11-10
Pages: 3
Assignors
SUNDARAM, SAIRAM
Executed: 2019-07-25
DURBIN, AARON
Executed: 2019-07-30
CHANDRASEKHARAN, RAMESH
Executed: 2019-07-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Dynamic Temperature Control of Substrate Support in Substrate Processing System