Patent Assignment
Reel/Frame 058069/0836
Assignment of Assignor's Interest
Recorded: 2021-11-10
Pages: 4
Assignors
BIRRU, KRISHNA
Executed: 2019-07-15
LIU, GANG
Executed: 2019-07-15
KHO, LEONARD
Executed: 2019-07-20
CHANDRASHEKAR, ANAND
Executed: 2019-07-24
HSU, GISHUN
Executed: 2019-07-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Cleaning System for Removing Deposits from Pump in an Exhaust of a Substrate Processing System