Patent Assignment
Reel/Frame 058130/0797
Assignment of Assignor's Interest
Recorded: 2021-11-16
Pages: 3
Assignor
KASAI, SHIGERU
Executed: 2021-11-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Adjustment Method for Mounting Base, Inspection Device, and Mounting Base