Patent Assignment
Reel/Frame 058153/0705
Assignment of Assignor's Interest
Recorded: 2021-11-18
Pages: 4
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus for Treating Substrate and Method of Coupling Support Unit