Patent Assignment
Reel/Frame 058166/0129
Assignment of Assignor's Interest
Recorded: 2021-11-19
Pages: 4
Assignor
MATSUI, KAZUMA
Executed: 2021-10-21
Assignee
SHOWA DENKO K.K.
13-9, SHIBADAIMON 1-CHOME, MINATO-KU, TOKYO, 105-8518, JAPAN
Covered Property
(1)
Dry Etching Method, Production Method for Semiconductor Element, and Cleaning Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.