Patent Assignment
Reel/Frame 058201/0302
Assignment of Assignor's Interest
Recorded: 2021-11-23
Pages: 3
Assignors
TSAO, CHIH-MING
Executed: 2021-06-08
CHUANG, TZU-SOU
Executed: 2021-06-08
YU, CHWEN
Executed: 2021-06-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Airborne Contaminant Management Method and System