Airborne contaminant management method and system
A method includes: generating a contaminant distribution map by sampling an environment of a cleanroom; selecting a first fabrication tool of the cleanroom by comparing the contaminant distribution map with at least one diffusion image in a first database; comparing parameters of the first fabrication tool against process utility information in a second database; and when the parameters are consistent with the process utility information, taking at least one action. The one action may include moving a cleaning tool to a location associated with a contaminant concentration of the contaminant distribution map; turning on a fan of the cleaning tool; stopping pod transit to the first fabrication tool; or halting production by the first fabrication tool.
1. A method, comprising:
generating a contaminant distribution map by sampling an environment of a cleanroom;
selecting a first fabrication tool of the cleanroom by comparing the contaminant distribution map with at least one diffusion image in a first database;
comparing parameters of the first fabrication tool against process utility information in a second database; and
when the parameters are consistent with the process utility information, taking at least one action of:
moving a cleaning tool to a location associated with a contaminant concentration of the contaminant distribution map;
turning on a fan of the cleaning tool;
stopping pod transit to the first fabrication tool; or
halting production by the first fabrication tool.
2. The method of claim 1 , wherein selecting the first fabrication tool comprises:
selecting a first diffusion image of the at least one diffusion image; and
selecting the first fabrication tool when a confidence level of the first fabrication tool is a highest confidence level of all fabrication tools associated with the first diffusion image.
3. The method of claim 2 , wherein the confidence level is determined based on at least one computational fluid dynamics simulation.
4. The method of claim 3 , wherein the confidence level is forecasted by a trained machine learning analysis model.
5. The method of claim 1 , wherein:
moving the cleaning tool to the location is performed when a peak concentration level of the contaminant distribution map is above a first threshold; and
turning on the fan is performed when the peak concentration level is above a second threshold higher than the first threshold.
6. The method of claim 5 , wherein:
stopping pod transit and halting production are performed when the peak concentration level is above a third threshold higher than the second threshold.
7. The method of claim 1 , wherein selecting the first fabrication tool includes selecting a tool accessory located beneath a raised floor of the cleanroom.
8. A method, comprising:
generating cleanroom contaminants data by sampling cleanroom contaminants by a sampling system;
generating a first image based on the cleanroom contaminants data by a time-of-flight mass spectrometer (TOF-MS);
selecting a first fabrication tool based on a forecast using the first image and at least one other cleanroom diffusion image; and
reducing contaminant concentration near the first fabrication tool by an automated guided vehicle (AGV) dispatched by an AGV controller.
9. The method of claim 8 , wherein sampling the cleanroom contaminants includes sampling at least one of chlorofluorocarbons, hydrofluorocarbons, perfluorocarbons, isopropyl alcohol, acetone or total volatile organic compounds (TVOC).
10. The method of claim 8 , wherein sampling the cleanroom contaminants includes sampling by the sampling system including sampling units at an areal density in a range of about 1 per square meter (m 2 ) to about 50 per m 2 .
11. The method of claim 10 , wherein areal density of the sampling units is higher in a first zone of the cleanroom than in a second zone of the cleanroom.
12. The method of claim 11 , wherein the first zone includes an etching apparatus or an electroless copper plating apparatus.
13. The method of claim 8 , further comprising verifying the first fabrication tool by confirming:
acid or solvent supply send from the first fabrication tool;
operational status of the first fabrication tool;
utility information of the first fabrication tool; or
chemical use information of the first fabrication tool.
14. A method, comprising:
positioning a wafer in a fabrication tool;
detecting a peak concentration level of a contaminant above a first threshold;
predicting the fabrication tool as a source of the contaminant;
stopping delivery of further wafers to the fabrication tool;
completing processing of the wafer by the fabrication tool;
removing the wafer from the fabrication tool;
lowering the peak concentration level by repairing the fabrication tool; and
resuming delivery of the further wafers to the fabrication tool when the fabrication tool is repaired and the peak concentration level is below a baseline threshold lower than the first threshold.
15. The method of claim 14 , further comprising dispatching a cleaning tool to the fabrication tool when the peak concentration level exceeds a second threshold between the first threshold and the baseline threshold.
16. The method of claim 15 , further comprising filtering air near the fabrication tool when the peak concentration level exceeds a third threshold between the second threshold and the first threshold.
17. The method of claim 16 , further comprising recalling the cleaning tool when the peak concentration level exceeds the first threshold.
18. The method of claim 16 , wherein filtering the air includes turning on a fan of the cleaning tool in fluidic communication with a filter of the cleaning tool.
19. The method of claim 18 , wherein filtering the air includes orienting the filter toward a location associated with the peak concentration level by a drive system of the cleaning tool.
20. The method of claim 15 , wherein dispatching the cleaning tool includes transmitting a dispatch command wirelessly from an automated guided vehicle (AGV) controller to an AGV having a filtration system.