Patent Assignment
Reel/Frame 058230/0282
Assignment of Assignor's Interest
Recorded: 2021-11-29
Pages: 3
Assignors
HSU, PEI-CHENG
Executed: 2020-01-15
LIEN, TA-CHENG
Executed: 2020-01-15
LEE, HSIN-CHANG
Executed: 2020-01-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Euv Masks to Prevent Carbon Contamination