Patent Assignment
Reel/Frame 058324/0633
Assignment of Assignor's Interest
Recorded: 2021-12-07
Pages: 4
Assignors
WOJTECKI, RUDY J.
Executed: 2021-12-06
NGUYEN, SON
Executed: 2021-12-06
PRANATHARTHIHARAN, BALASUBRAMANIAN S.
Executed: 2021-12-07
PEETHALA, CORNELIUS BROWN
Executed: 2021-12-06
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Etch Back and Film Profile Shaping of Selective Dielectric Deposition