Patent Assignment
Reel/Frame 058355/0507
Assignment of Assignor's Interest
Recorded: 2021-12-10
Pages: 5
Assignors
LIANG, ANDREW
Executed: 2020-06-19
SHAMMA, NADER
Executed: 2020-06-15
WISE, RICH
Executed: 2020-06-15
SINGHAL, AKHIL
Executed: 2020-07-10
MAHOROWALA, ARPAN PRAVIN
Executed: 2020-07-08
BLACHUT, GREGORY
Executed: 2020-06-15
AUSTIN, DUSTIN ZACHARY
Executed: 2020-06-15
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Extreme Ultraviolet (Euv) Lithography Using an Intervening Layer or a Multi-Layer Stack with Varying Mean Free Paths for Secondary Electron Generation