Patent Assignment
Reel/Frame 058356/0777
Assignment of Assignor's Interest
Recorded: 2021-12-10
Pages: 5
Assignee
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
HANYANG UNIVERSITY, 222, WANGSIMNI-RO SEONGDONG-GU, SEOUL, 04763, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method