Patent Assignment
Reel/Frame 058388/0985
Assignment of Assignor's Interest
Recorded: 2021-12-14
Pages: 3
Assignee
SHINKO ELECTRIC INDUSTRIES CO., LTD.
80, OSHIMADA-MACHI, NAGANO-SHI, NAGANO, 381-2287, JAPAN
Covered Property
(1)
Electrostatic Chuck and Substrate Fixing Device