Patent Assignment
Reel/Frame 058415/0078
Assignment of Assignor's Interest
Recorded: 2021-12-17
Pages: 7
Assignors
NAKAZAWA, TAKASHI
Executed: 2021-11-30
MIYAMOTO, ISAMU
Executed: 2021-12-01
SATAKE, KEIGO
Executed: 2021-12-02
NAKAMIZO, KENJI
Executed: 2021-12-02
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus