Patent Assignment
Reel/Frame 058419/0855
Assignment of Assignor's Interest
Recorded: 2021-12-17
Pages: 4
Assignors
LUTKER-LEE, KATIE
Executed: 2021-12-17
RALEY, ANGELIQUE
Executed: 2021-12-16
JOY, NICHOLAS
Executed: 2021-12-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Patterning a Substrate Using Photolithography