Patent Assignment
Reel/Frame 058496/0292
Assignment of Assignor's Interest
Recorded: 2021-12-29
Pages: 5
Assignors
KIM, JU WON
Executed: 2021-12-29
RYU, YANG YEOL
Executed: 2021-12-29
AHN, HEE MAN
Executed: 2021-12-29
SEO, JUN HO
Executed: 2021-12-29
PARK, DONG WOON
Executed: 2021-12-29
YOON, SANG PIL
Executed: 2021-12-29
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus for Smoothly Exhausting the Atmosphere in a Processing Space When Rotating a Substrate with Liquid