Patent Assignment
Reel/Frame 058511/0722
Assignment of Assignor's Interest
Recorded: 2021-12-30
Pages: 3
Assignor
WANG, CHIH-YU
Executed: 2021-12-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method and System for Recognizing and Addressing Plasma Discharge During Semiconductor Processes