Patent Assignment
Reel/Frame 058588/0266
Assignment of Assignor's Interest
Recorded: 2022-01-10
Pages: 11
Assignors
YAMAWAKI, YOHEI
Executed: 2022-01-05
NAKANO, SEIJI
Executed: 2021-12-27
KAWAGUCHI, YOSHIHIRO
Executed: 2021-12-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Separating Apparatus and Separating Method