Separating apparatus and separating method
A separating apparatus configured to separate a processing target object into a first separation body and a second separation body includes a first holder configured to hold the first separation body; a second holder configured to hold the second separation body; a moving unit configured to move the first holder and the second holder relatively to each other; and a separation surface cleaning unit configured to clean at least a separation surface of the first separation body or a separation surface of the second separation body.
1 . A separating apparatus configured to separate a processing target object into a first separation body and a second separation body, the separating apparatus comprising:
a first holder configured to hold the first separation body;
a second holder configured to hold the second separation body;
a moving unit configured to move the first holder and the second holder relatively to each other; and
a suction nozzle configured to suction a space between the first holder and the second holder, and configured to move within the space between the first holder and the second holder.
2 . The separating apparatus of claim 1 , further comprising:
a transfer unit configured to hold and transfer the first separation body or the second separation body; and
a cleaning mechanism configured to clean at least a separation surface of the first separation body or a separation surface of the second separation body held by the transfer unit.
3 . The separating apparatus of claim 1 , further comprising:
a transfer unit configured to hold and transfer the first separation body or the second separation body; and
a partial cleaning member configured to clean a holding portion of the first separation body or a holding portion of the second separation body held by the transfer unit.
4 . The separating apparatus of claim 1 , further comprising:
a transfer unit configured to transfer the first separation body or the second separation body, the transfer unit having a transfer pad configured to attract and hold the first separation body or the second separation body; and
a pad cleaning unit configured to clean the transfer pad.
5 . The separating apparatus of claim 1 , further comprising:
a cleaning nozzle configured to supply a cleaning fluid into the space between the first holder and the second holder, and configured to move within the space between the first separation body and the second separation body,
wherein the suction nozzle is configured to suck the cleaning fluid supplied from the cleaning nozzle.
6 . The separating apparatus of claim 1 , further comprising:
a cleaning nozzle configured to supply a cleaning fluid into the space between the first holder and the second holder, and configured to move within the space between the first separation body and the second separation body; and
a cup disposed to surround the first holder and the second holder and configured to collect the cleaning fluid supplied from the cleaning nozzle.
7 . The separating apparatus of claim 1 , further comprising:
a scrub cleaning unit configured to scrub-clean a separation surface of the first separation body and a separation surface of the second separation body.
8 . A separating method of separating a processing target object into a first separation body and a second separation body, the separating method comprising:
moving the first separation body held by a first holder and the second separation body held by a second holder relatively to each other to separate the first separation body and the second separation body; and
suctioning a space between the first holder and the second holder by a suction nozzle,
wherein the suction nozzle is configured to move within the space between the first holder and the second holder.
9 . The separating method of claim 8 ,
wherein the first separation body or the second separation body is held and transferred by a transfer unit, and
at least a separation surface of the first separation body or a separation surface of the second separation body held by the transfer unit is cleaned.
10 . The separating method of claim 8 ,
wherein the first separation body or the second separation body is held and transferred by a transfer unit, and
a holding portion of the first separation body or a holding portion of the second separation body held by the transfer unit is cleaned.
11 . The separating method of claim 8 ,
wherein the first separation body or the second separation body is transferred while being attracted to and held by a transfer pad of a transfer unit, and
the transfer pad is cleaned.
12 . The separating method of claim 8 , further comprising:
supplying a cleaning fluid from a cleaning nozzle into the space between the first holder and the second holder,
wherein the cleaning nozzle is configured to move within the space between the first holder and the second holder, and
wherein the cleaning fluid supplied from the cleaning nozzle is sucked from the suction nozzle.
13 . The separating method of claim 8 , further comprising:
supplying a cleaning fluid from a cleaning nozzle into the space between the first holder and the second holder,
wherein the cleaning nozzle is configured to move within the space between the first holder and the second holder,
wherein a cup disposed to surround the first holder and the second holder is provided, and
wherein the cleaning fluid supplied from the cleaning nozzle is collected into the cup.
14 . The separating method of claim 8 ,
wherein a separation surface of the first separation body and a separation surface of the second separation body are scrub-cleaned.
15 . A separating apparatus configured to separate a processing target object into a first separation body and a second separation body, the separating apparatus comprising:
a first holder configured to hold the first separation body;
a second holder configured to hold the second separation body;
a moving unit configured to move the first holder and the second holder relatively to each other; and
a scrub cleaning tool configured to advance to a space between the first holder and the second holder and configured to scrub-clean at least a separation surface of the first separation body held by the first holder or a separation surface of the second separation body held by the second holder, and configured to retreat from the space.
16 . A separating method of separating a processing target object into a first separation body and a second separation body, the separating method comprising:
moving the first separation body held by a first holder and the second separation body held by a second holder relatively to each other to separate the first separation body and the second separation body; and
advancing a scrub cleaning tool into a space between the first separation body held by the first holder and the second separation body held by the second holder and scrub-cleaning at least a separation surface of the first separation body or a separation surface of the second separation body by the scrub cleaning tool, and retreating from the space between the first separation body and the second separation body.