Patent Assignment
Reel/Frame 058598/0774
Assignment of Assignor's Interest
Recorded: 2021-12-29
Pages: 5
Assignors
CHOI, YOUNG SEOP
Executed: 2021-12-28
SEO, YONG-JUN
Executed: 2021-12-28
SON, SANG HYUN
Executed: 2021-12-28
LEE, JI YOUNG
Executed: 2021-12-28
KIM, GYEONG RYUL
Executed: 2021-12-28
PARK, SUN YONG
Executed: 2021-12-28
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Buffer Unit and Method for Storaging Substrate Type Senseor for Measuring of Horizontality of a Substrate Support Member Provided on a Temperature Varying Atmosphere