Patent Assignment
Reel/Frame 058624/0584
Assignment of Assignor's Interest
Recorded: 2022-01-11
Pages: 8
Assignors
SHINADA, MASATO
Executed: 2021-12-21
MIYASHITA, TETSUYA
Executed: 2021-12-21
WATANABE, NAOKI
Executed: 2021-12-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Formation Apparatus and Film Formation Method