Patent Assignment
Reel/Frame 058626/0602
Assignment of Assignor's Interest
Recorded: 2022-01-12
Pages: 5
Assignor
MATSUKI, NOBUO
Executed: 2021-12-28
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Method for Forming Insulation Film