Patent Assignment
Reel/Frame 058665/0234
Assignment of Assignor's Interest
Recorded: 2022-01-14
Pages: 5
Assignors
WANG, CHAO-HSUN
Executed: 2019-08-30
LEE, CHEN-MING
Executed: 2019-08-30
CHAO, KUO-YI
Executed: 2019-08-30
WANG, MEI-YUN
Executed: 2019-08-30
CHOU, PEI-YU
Executed: 2019-08-30
CHEN, KUO-JU
Executed: 2019-08-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods of Forming Air Spacers in Semiconductor Devices