Patent Assignment
Reel/Frame 058669/0059
Assignment of Assignor's Interest
Recorded: 2022-01-17
Pages: 11
Assignors
MORI, HIROTOSHI
Executed: 2022-01-07
YAMASHITA, YOHEI
Executed: 2022-01-07
TANOUE, HAYATO
Executed: 2022-01-07
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing Apparatus and Processing Method