Patent Assignment
Reel/Frame 058916/0987
Assignment of Assignor's Interest
Recorded: 2022-01-31
Pages: 3
Assignor
YAMAGUCHI, WATARU
Executed: 2022-01-06
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measurement Apparatus, Lithography Apparatus and Article Manufacturing Method