Patent Assignment
Reel/Frame 058925/0785
Assignment of Assignor's Interest
Recorded: 2022-02-08
Pages: 5
Assignor
KOBUNE, TAKAKI
Executed: 2022-02-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus