Patent Assignment
Reel/Frame 058943/0969
Assignment of Assignor's Interest
Recorded: 2022-02-09
Pages: 3
Assignors
ZHANG, CHUNLEI
Executed: 2022-01-28
ZHU, ZHAOZHAO
Executed: 2022-01-28
KUTNEY, MICHAEL
Executed: 2022-01-31
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Chamber Component Condition Estimation Using Substrate Measurements