Patent Assignment
Reel/Frame 058947/0428
Assignment of Assignor's Interest
Recorded: 2022-02-02
Pages: 12
Assignors
NAKAYAMA, RYO
Executed: 2022-01-05
UNNO, YASUYUKI
Executed: 2021-12-27
MATSUMOTO, TAKAHIRO
Executed: 2022-01-05
MIYAHARU, TAKAFUMI
Executed: 2022-01-05
KAWASHIMA, TOORU
Executed: 2021-12-27
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Detection Apparatus, Lithography Apparatus, and Article Manufacturing Method