Patent Assignment
Reel/Frame 058974/0026
Assignment of Assignor's Interest
Recorded: 2022-02-10
Pages: 6
Assignors
LEE, SEUNGWON
Executed: 2022-02-10
SEOL, MINSU
Executed: 2022-02-10
LEE, DONGWOOK
Executed: 2021-08-28
SHIN, HYEONJIN
Executed: 2022-02-10
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Pellicle for Extreme Ultraviolet Lithography and Method of Manufacturing the Same