Patent Assignment
Reel/Frame 059073/0921
Assignment of Assignor's Interest
Recorded: 2022-02-23
Pages: 3
Assignors
MENG, SHUANG
Executed: 2018-01-08
MA, SHAWMING
Executed: 2018-01-08
YANG, MICHAEL X.
Executed: 2018-01-09
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Processing of Semiconductors Using Vaporized Solvents
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 4, 2018
From: MENG, SHUANG; MA, SHAWMING
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 047664/0270 →
Security Interest
Sep 6, 2019
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 050299/0372 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →