Patent Assignment
Reel/Frame 059090/0544
Assignment of Assignor's Interest
Recorded: 2022-02-24
Pages: 7
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Transfer Device and Substrate Processing System