Patent Assignment
Reel/Frame 059157/0503
Assignment of Assignor's Interest
Recorded: 2022-03-03
Pages: 4
Assignors
HSU, PEI-CHENG
Executed: 2022-02-28
TSAI, PING-HUAN
Executed: 2022-02-28
LEE, HUAN-LING
Executed: 2022-02-28
LIEN, TA-CHENG
Executed: 2022-02-28
LEE, HSIN-CHANG
Executed: 2022-03-03
LIN, CHIN-HSIANG
Executed: 2022-02-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods to Improve Mechanical Properties of Pellicle Membrane