Methods to improve mechanical properties of pellicle membrane
A pellicle assembly includes a pellicle membrane with a nanotube layer formed from nanotubes having a minimum length of 1,000 μm. The pellicle membrane can be formed with multiple layers and has a combination of high transmittance, low deflection, and small pore size. A conformal coating may applied to an outer surface of the pellicle membrane. The conformal coating is intended to protect the pellicle membrane from damage that can occur due to heat and hydrogen plasma created during EUV exposure.
1 . A method of forming a pellicle assembly, comprising:
reducing a thickness of an initial membrane by stretching the initial membrane to obtain a first nanotube layer for a pellicle membrane, wherein the initial membrane comprises nanotubes having a minimum length of 1,000 μm;
annealing the initial membrane while stretching the initial membrane; and
affixing the pellicle membrane to a mounting frame to obtain the pellicle assembly.
2 . The method of claim 1 , wherein the nanotubes comprise carbon, boron nitride, silicon carbide, molybdenum disulfide, molybdenum diselenide, tungsten disulfide, or tungsten diselenide.
3 . The method of claim 1 , wherein the thickness of the initial membrane is reduced by:
stretching the initial membrane using a stretching frame to obtain an extended membrane;
affixing the mounting frame to a portion of the extended membrane; and
separating the mounting frame and the portion of the extended membrane from the remainder of the extended membrane, to obtain the pellicle assembly.
4 . The method of claim 1 , wherein the initial membrane is stretched biaxially.
5 . The method of claim 1 , wherein the annealing occurs in a vacuum environment or an ambient environment.
6 . The method of claim 1 , wherein the initial membrane is annealed at a temperature of about 200° C. to about 800° C.
7 . The method of claim 1 , further comprising flowing an inert gas past the initial membrane during the stretching.
8 . The method of claim 7 , wherein the inert gas is N 2 , or wherein the inert gas is flowed at a rate of about 2 sccm to about 20 sccm.
9 . The method of claim 1 , wherein the pellicle membrane is a multi-layer structure comprising the first nanotube layer and a second nanotube layer, wherein the first nanotube layer is a single nanotube layer and the second nanotube layer is a nanotube bundle layer.
10 . The method of claim 1 , wherein a conformal coating is applied to at least an outer surface of the pellicle membrane.
11 . The method of claim 10 , wherein the conformal coating has a transmittance (T %), when measured at an EUV wavelength of 13.5 nm and at a thickness of between 1 nm and 10 nm, of greater than 90%.
12 . The method of claim 10 , wherein the conformal coating comprises B, BN, B 4 C, B 2 O 3 , SiN, Si 3 N 4 , SiN 2 , SiC, SiC x N y , Nb, NbN, NbSi, NbSiN, Nb 2 O 5 , NbTi x N y , ZrN x , ZrY x O y , ZrF 4 , ZrSi 2 , YN, Y 2 O 3 , YF, Mo, MO 2 N, MoSi, MoSi 2 , MoSiN, Ru, RuNb, RuSiN, TiN, TiC x N y , HfO 2 , HfN x , HfF 4 , or VN.
13 . A method of forming a pellicle assembly, comprising:
stretching an initial membrane to reduce its thickness and obtain a first nanotube layer for a pellicle membrane, wherein the initial membrane comprises nanotubes having a minimum length of 1,000 μm;
annealing the initial membrane while stretching the initial membrane;
forming a multi-layer pellicle membrane that includes the first nanotube layer; and
affixing the pellicle membrane to a mounting frame to obtain the pellicle assembly.
14 . The method of claim 13 , further comprising applying a conformal coating to the pellicle membrane.
15 . The method of claim 1 , wherein the multi-layer pellicle membrane further comprises a graphene membrane layer.
16 . The method of claim 13 , wherein the initial membrane is annealed at a temperature of about 200° C. to about 800° C.
17 . The method of claim 13 , further comprising flowing an inert gas past the initial membrane during the stretching.
18 . The method of claim 17 , wherein the inert gas is N 2 , or wherein the inert gas is flowed at a rate of about 2 sccm to about 20 sccm.
19 . A method of forming a pellicle assembly, comprising:
stretching an initial membrane to reduce its thickness and obtain a first nanotube layer for a pellicle membrane, wherein the initial membrane comprises nanotubes having a minimum length of 1,000 μm;
annealing the initial membrane while stretching the initial membrane;
forming a multi-layer pellicle membrane that includes the first nanotube layer and a graphene membrane layer; and
affixing the pellicle membrane to a mounting frame to obtain the pellicle assembly.
20 . The method of claim 19 , wherein the multi-layer pellicle membrane further comprises a second nanotube layer.