Patent Assignment
Reel/Frame 059213/0141
Assignment of Assignor's Interest
Recorded: 2022-03-09
Pages: 8
Assignors
HAN, YUN
Executed: 2022-03-02
RANJAN, ALOK
Executed: 2022-02-23
OISHI, TOMOYUKI
Executed: 2022-02-18
OGAWA, SHUHEI
Executed: 2022-02-18
KOBAYASHI, KEN
Executed: 2022-02-18
BIOLSI, PETER
Executed: 2022-03-03
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching of Polycrystalline Semiconductors