Patent Assignment
Reel/Frame 059226/0972
Assignment of Assignor's Interest
Recorded: 2022-03-10
Pages: 22
Assignors
TAKEBAYASHI, YUJI
Executed: 2022-02-28
HIRANO, MAKOTO
Executed: 2022-02-28
SHIBATA, KOJI
Executed: 2022-02-28
OKAJIMA, YUSAKU
Executed: 2022-02-28
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Elevator and Method of Manufacturing Semiconductor Device