Patent Assignment
Reel/Frame 059318/0284
Assignment of Assignor's Interest
Recorded: 2022-03-03
Pages: 3
Assignor
HATTORI, TADASHI
Executed: 2022-02-10
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measurement Apparatus, Lithography Apparatus, and Method of Manufacturing Article