Patent Assignment
Reel/Frame 059444/0685
Assignment of Assignor's Interest
Recorded: 2022-03-30
Pages: 8
Assignors
LI, LIFU
Executed: 2022-03-14
KOBUNE, TAKAKI
Executed: 2022-03-29
TSUJIMOTO, HIROSHI
Executed: 2022-03-14
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Upper Electrode Assembly