Upper electrode assembly
An upper electrode assembly used in a plasma processing apparatus is provided. The upper electrode assembly comprises: an electrode plate; a metal plate; and a heat transfer sheet disposed between the electrode plate and the metal plate and having a vertically oriented portion. The vertically oriented portion has a plurality of vertically oriented graphene structures oriented along a vertical direction.
1. An upper electrode assembly used in a plasma processing apparatus, the upper electrode assembly comprising:
an electrode plate;
a metal plate; and
a heat transfer sheet disposed between the electrode plate and the metal plate, the heat transfer sheet having a vertically oriented portion, wherein
the vertically oriented portion includes a plurality of nanotubes extending along a vertical direction,
each nanotube, of the plurality of nanotubes, has a plurality of graphene sheets, and
each graphene sheet is normal to a horizontal direction.
2. The upper electrode assembly of claim 1 , wherein the plurality of vertically oriented nanotubes are carbon nanotubes.
3. The upper electrode assembly of claim 1 , wherein the plurality of graphene sheets are laminated along the horizontal direction.
4. The upper electrode assembly of claim 1 , wherein
the heat transfer sheet further includes a horizontally oriented portion,
the horizontally oriented portion includes a plurality of horizontally oriented graphene structures oriented along the horizontal direction, and
the vertically oriented portion and the horizontally oriented portion are laminated along the vertical direction.
5. The upper electrode assembly of claim 4 , wherein the horizontally oriented portion has a plurality of horizontally oriented carbon nanotubes oriented along the horizontal direction.
6. The upper electrode assembly of claim 4 , wherein
the each of the plurality of graphene structures is a graphene sheet, and
the plurality of horizontally oriented graphene structures is laminated in the vertical direction.
7. The upper electrode assembly of claim 1 , wherein
the heat transfer sheet further includes a horizontally oriented portion,
the horizontally oriented portion includes a plurality of horizontally oriented graphene structures oriented along the horizontal direction, and
the vertically oriented portion and the horizontally oriented portion are arranged along the horizontal direction.
8. The upper electrode assembly of claim 1 , wherein the metal plate has at least one coolant flow passage, at least one gas diffusion space, and at least one heating module.
9. The upper electrode assembly of claim 8 , wherein said at least one heating module is disposed so as not to overlap said at least one coolant flow passage.
10. The upper electrode assembly of claim 1 , further comprising:
an additional metal plate; and
an additional heat transfer sheet disposed between the metal plate and the additional metal plate and having an additional vertically oriented portion, wherein
the additional vertically oriented portion includes a plurality of additional nanotubes extending along the vertical direction.
11. The upper electrode assembly of claim 10 , wherein
the metal plate has therein at least one gas diffusion space,
the additional metal plate has therein at least one coolant flow passage, and
at least one of the metal plate or the additional metal plate has therein at least one heating module.
12. The upper electrode assembly of claim 11 , wherein said at least one heating module is disposed so as not to vertically overlap said at least one coolant flow passage.
13. The upper electrode assembly of claim 10 , wherein
the additional heat transfer sheet has an additional horizontally oriented portion having a plurality of additional horizontally oriented graphene structures oriented along the horizontal direction, and
the additional vertically oriented portion and the additional horizontally oriented portion are laminated in the vertical direction.
14. The upper electrode assembly of claim 13 , wherein the additional horizontally oriented portion has a plurality of additional horizontally oriented carbon nanotubes oriented along the horizontal direction, and each of the plurality of additional horizontally oriented carbon nanotubes has the plurality of additional horizontally oriented graphene structures.
15. The upper electrode assembly of claim 13 , wherein the additional horizontally oriented portion has a plurality of additional horizontally oriented graphite sheets that are laminated in the vertical direction, and each of the plurality of additional horizontally oriented graphite sheets has the plurality of additional horizontally oriented graphene structures.
16. The upper electrode assembly of claim 10 , wherein
the additional heat transfer sheet has an additional horizontally oriented portion having a plurality of additional horizontally oriented graphene structures oriented along the horizontal direction, and
the additional vertically oriented portion and the additional horizontally oriented portion are arranged along the horizontal direction.