Patent Assignment
Reel/Frame 059533/0244
Assignment of Assignor's Interest
Recorded: 2022-04-07
Pages: 4
Assignors
AOKI, RIKUTA
Executed: 2022-03-18
MIZUKAMI, DAIJO
Executed: 2022-03-23
AIHARA, TOMOAKI
Executed: 2022-03-20
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method