Substrate processing apparatus and substrate processing method
A substrate processing apparatus includes a processing liquid tank, a first circulation pipe, a filter, a pump, and a controller. The first circulation pipe has an upstream end connected to the processing liquid tank and a downstream end connected to the processing liquid tank. A processing liquid circulates in the first circulation pipe. The filter is deposed in the first circulation pipe and captures particles contained in the processing liquid. The pump is disposed in the first circulation pipe. The pump includes a rotor and feeds the processing liquid by rotating the rotor. In activation of the pump in a stopped state, the controller controls the pump so that the rotor rotates at a rotational acceleration of no greater than 400 rpm/sec.
1. A substrate processing method for processing a substrate with a processing liquid, the method comprising:
a first rotation step of activating a pump that is in a stopped state and is disposed in a first circulation pipe such that a rotational speed of a rotor of the pump increases to a target rotational speed at a rotational acceleration of no greater than 50 rpm/second and that the rotational speed reaches the target rotational speed 120 seconds or longer after the activation of the pump, thereby to cause the processing liquid to flow through the first circulation pipe, the pump being disposed upstream of a filter in the first circulation pipe;
a first circulation step of causing the processing liquid to circulate through the first circulation pipe after the first rotation step; and
a processing liquid supply step of supplying the processing liquid to the substrate through a pipe branched from the first circulation pipe during the first circulation step.
2. The substrate processing method according to claim 1 , further comprising
a second rotation step, in which the rotor is kept rotating at the target rotational speed once the rotational speed of the rotor reaches the target rotational speed by the first rotation step,
wherein, in the processing liquid supply step, the processing liquid is supplied to the substrate in a state in which the rotor is kept rotating at the target rotational speed.
3. The substrate processing method according to claim 1 , further comprising
a circulation pipe liquid discharge step of discharging, during the first rotation step, the processing liquid from the first circulation pipe via a first liquid discharge pipe branched from the first circulation pipe.
4. The substrate processing apparatus according to claim 1 , further comprising
a filter liquid discharge step of discharging, during the first rotation step, the processing liquid from the filter via a second liquid discharge pipe extending from the filter.
5. The substrate processing method according to claim 1 , further comprising
a second circulation step of guiding, during the first rotation step, the processing liquid to a second circulation pipe branched from the first circulation pipe, while blocking a flow path of the first circulation pipe, wherein
the second circulation pipe extends from the first circulation pipe to a processing liquid storing section that stores the processing liquid therein.