Patent Assignment
Reel/Frame 059603/0697
Assignment of Assignor's Interest
Recorded: 2022-04-14
Pages: 8
Assignors
HAN, YUN
Executed: 2022-03-30
RANJAN, ALOK
Executed: 2022-04-08
VENTZEK, PETER
Executed: 2022-04-08
METZ, ANDREW
Executed: 2022-03-31
NIIMI, HIROAKI
Executed: 2022-04-04
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Forming a Fet Structure by Selective Deposition of Film on Source/Drain Contact