Patent Assignment
Reel/Frame 059605/0839
Assignment of Assignor's Interest
Recorded: 2022-04-14
Pages: 7
Assignors
OH, MYOUNG-KYU
Executed: 2022-02-25
KWAK, GYEHOON
Executed: 2022-03-17
KIM, JUNGUK
Executed: 2022-03-17
KIM, HYEONJU
Executed: 2022-02-25
Assignees
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY
1, ORYONG-DONG, BUK-GU, GWANGJU, 500-712, KOREA, REPUBLIC OF
Covered Property
(1)
Semiconductor Fabrication Apparatus and Fabrication Method