Semiconductor fabrication apparatus and fabrication method
A semiconductor fabrication apparatus comprises a process chamber, an ozone supply that provides the process chamber with ozone, an oxygen supply that provides the ozone supply with a source gas of the ozone, and a plurality of impurity detectors disposed between the oxygen supply and the ozone supply. The impurity detectors detect an inactive gas in the source gas.
1. A semiconductor fabrication apparatus, comprising:
a process chamber that includes a chuck and a first power supply connected to the chuck;
an ozone supply that provides the process chamber with ozone, wherein the ozone supply includes a first supply line connected to the process chamber, first electrodes disposed on both sides of the first supply line, and second power supply connected to the first electrodes;
an oxygen supply that provides the ozone supply with a source gas for the ozone; and
a plurality of impurity detectors disposed between the oxygen supply and the ozone supply, wherein the impurity detectors detect an inactive gas in the source gas, each of the plurality of impurity detectors includes a gas cell, second electrodes disposed in the gas cell, and third power supplies connected to the second electrodes, wherein the second electrodes are smaller than the first electrodes,
wherein the first power supply provides a first radio frequency power into the chuck to generate a first plasma of a process gas,
wherein the second power supply provides a second radio frequency power less than the first radio frequency power into the first electrodes to generate the ozone from the source gas,
wherein each of the third power supplies provides a third radio frequency power less than the second radio frequency power into the second electrodes to generate a second plasma of the source gas,
wherein the first radio frequency power is 1 KW to 10 KW,
wherein the second radio frequency power is 100 W to 1 KW, and
wherein the third radio frequency power is 10 W to 100 W.
2. The apparatus of claim 1 , further comprising an oxygen purifier disposed between the oxygen supply and the ozone supply, wherein the oxygen purifier removes carbon dioxide in the source gas.
3. The apparatus of claim 2 , wherein the impurity detectors include:
a first impurity detector disposed between the oxygen supply and the oxygen purifier, wherein the first impurity detector detects the carbon dioxide; and
a second impurity detector disposed between the oxygen purifier and the ozone supply, wherein the second impurity detector detects the inactive gas.
4. The apparatus of claim 1 ,
wherein each of the third power supplies each include a resistor configured to adjust the third radio frequency power.
5. The apparatus of claim 1 , wherein each of the impurity detectors further includes:
an optical system disposed on a view port of the gas cell, wherein the optical system projects plasma light of the carbon dioxide or the inactive gas; and
an optical sensor connected to the optical system, wherein the optical sensor detects the plasma light.
6. The apparatus of claim 5 , wherein each of the impurity detectors further includes:
an optical fiber disposed between the optical system and the optical sensor; and
a spectroscope disposed between the optical fiber and the optical sensor.
7. The apparatus of claim 6 , wherein the optical fiber includes a plurality of optical fibers,
wherein the plurality of optical fibers include:
an input end that has a circular bundle shape; and
an output end that has a linear bundle shape.
8. The apparatus of claim 5 , wherein each of the impurity detectors further includes a cooler in contact with the optical sensor, wherein the cooler cools the optical sensor.
9. The apparatus of claim 1 , wherein the second electrodes include gold (Au).