Patent Assignment
Reel/Frame 059609/0916
Assignment of Assignor's Interest
Recorded: 2022-04-15
Pages: 4
Assignors
HAN, YUN
Executed: 2022-03-30
METZ, ANDREW
Executed: 2022-03-31
BIOLSI, PETER
Executed: 2022-04-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Sacrificial Capping Layer for Contact Etch