Patent Assignment
Reel/Frame 059638/0656
Assignment of Assignor's Interest
Recorded: 2022-04-19
Pages: 3
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.